Nanopositioning Stages
SPM Stages
Dense Media Device

When SPM scanning ranges in the 100’s of microns come up short, t.enable’s solution in the 10’s of millimeters redefines the industry.

The first scanning probe microscopes relied on a clever actuation scheme. The designs were largely based on thin-walled piezoelectric tubes with quartered outer electrodes. This compact, elegant design readily actuated a probe, or small sample, in mutually perpendicular directions with nanometer resolution – but not without its drawbacks. Two of these drawbacks are the hysteresis and creep inherent to piezo-based positioning devices. Easily remedied by closing the loop, it was a number of years before commercially available SPM’s were being offered with hysteresis and creep-free operation. The other drawback, however, is the fundamental limitation of range – piezos do not actuate very far. While some SPM manufacturers offer variations on the thin-walled tube design, all still use piezo-based actuation and thus, are limited to scan areas on the order of 100um x 100um. Typically, a long-range, low-bandwidth coarse stage is placed in series with the high-speed scanning stage. Thus, there is an obvious need for an extended-range solution.

t.enable’s innovative nanopositioning technology is an alternative to piezo-based actuation designs. The goal is to provide SPM manufacturers with a product that will not only meet their rigorous resolution and repeatability specifications, but that will redefine the industry by opening up scan areas by a factor of 10,000 – 10mm x 10mm – in a single high-speed scanning stage, with nanometer resolution. The implications of this added flexibility to nanolithography and nanomanipulation applications are significant.

Nanoscale science will never be the same

Our innovative actuation technology achieves true nanometer-level resolution over tens-of-millimeters of range, with cross-axis noise well below the resolution. Our systems are designed for high-speed operation, unparalleled electromechanical stiffness and ease of integration. Please select from the menu above to find out more about the products t.enable has to offer.
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