When SPM scanning
ranges in the 100s of microns come up short, t.enables
solution in the 10s of millimeters redefines the industry.
The first scanning
probe microscopes relied on a clever actuation scheme. The designs
were largely based on thin-walled piezoelectric tubes with quartered
outer electrodes. This compact, elegant design readily actuated
a probe, or small sample, in mutually perpendicular directions with
nanometer resolution but not without its drawbacks. Two of
these drawbacks are the hysteresis and creep inherent to
piezo-based positioning devices. Easily remedied by closing the
loop, it was a number of years before commercially available SPMs
were being offered with hysteresis and creep-free operation. The
other drawback, however, is the fundamental limitation of range
piezos do not actuate very far. While some SPM manufacturers
offer variations on the thin-walled tube design, all still use
piezo-based actuation and thus, are limited to scan areas on the
order of 100um x 100um. Typically, a long-range, low-bandwidth coarse
stage is placed in series with the high-speed scanning stage. Thus, there
is an obvious need for an extended-range solution.
t.enables
innovative nanopositioning technology is an alternative to piezo-based
actuation designs. The goal is to provide SPM manufacturers with
a product that will not only meet their rigorous resolution and repeatability
specifications, but that will redefine the industry by opening up scan
areas by a factor of 10,000 10mm x 10mm in a single high-speed
scanning stage, with nanometer resolution. The implications of this
added flexibility to nanolithography and nanomanipulation applications
are significant.
Nanoscale science will never be the same